The order demonstrates the progress of the integration of the ALCVD technology into ASM’s advanced CVD product family. ALCVD is a deposition process that ensures dense and pinhole-free films with exceptional thickness uniformity, even over irregular-shaped surfaces. The thickness of the film is determined by the number of atomic layers deposited and can be very precisely controlled. This technology allows the deposition of a wide variety of materials, particularly oxides and nitrides.
ALCVD is an enabling technology which can be scaled down to well below 0.07 µm. Further, because of the nature of the surface chemistries involved, scaling up in terms of wafer sizes of 300mm and larger, is straightforward. This allows for the use of high-k materials for gate and DRAM dielectrics, as well as barrier layers in copper technology for many generations to come. It provides a perfect match with ASM’s present range of CVD systems, in particular with the Polygon high-k and the Eagle-10 low-k product families.
ASM Microchemistry received also an order for a stand-alone ALCVD tool for Flat Panel Display applications from a large North American customer for shipment in the second quarter of 2000. The two orders represent a value of several million US dollars.
The ALCVD technology is sold into the semiconductor market as well as into flat panel display and magnetic head markets. ASM Microchemistry is the world’s leading supplier of production worthy ALCVD equipment. Its installed base approaches 45 systems worldwide.
About ASM
ASM International is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer-processing, assembly and packaging segments through their facilities in the United States, Europe, Japan and Asia. ASM International's common shares trade on the NASDAQ National Market under the symbol “ASMI” and on the Euronext Stock Exchange in Amsterdam under the symbol “ASM.” More information on ASM can be found on its website at http://www.asm.com
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Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995: The statements regarding orders, earnings development and the effects of research and new products on ASM’s future, and other matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, risk factors related to litigation and other risks indicated in filings from time to time with the SEC and Stock Exchange Authorities.